Sputtering

This vapor deposition process is used to deposit thin films onto a substrate, for example in semiconductor manufacture or optical glass coating. Surface inspection is essential to monitoring product quality.

In sputtering, the plastic coating goes from a condensed phase to a vapor phase before condensing onto the substrate to form the finished coating. This process is widely used in semiconductor manufacture for integrated circuit processing. The dimensions of the film require a high-precision monitoring system to ensure accuracy.

The condensed coating material is ejected from a target source onto a substrate such as a silicon wafer. It is a complex process with a variety of control parameters which allows a large degree of management of the growth and microstructure of the deposited film.

Sputtered films are typically very thin, so surface defect detection can be difficult. High-precision inspection hardware and expert classification software are essential to monitor coverage to ensure quality and discover any imperfections in the coating.
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